Semiconductor Subsystems - HIWIN

Ball Screws

Ball Splines

Linear Guideways

Single-Axis Robots

Multi-Axis Robots

End Effectors

Harmonic Drives

Bearings

Torque Motor Rotary Tables

Torque Motors

Drives & Controllers

Linear Motor Stages

Direct Drive Motors

Semiconductor Subsystems

HIWIN semiconductor subsystems provide high-cleanliness linear motion and positioning modules for wafer processing equipment.

Wafer Loader / Load Port

Wafer Loader / Load Port

Wafer Aligner

Wafer Aligner

RWSE Wafer Robot

RWSE Wafer Robot

RWDE Wafer Robot

RWDE Wafer Robot

EFEM220-D13 Wafer Transfer System

EFEM220-D13 Wafer Transfer System

EFEM320-D01 Wafer Transfer System

EFEM320-D01 Wafer Transfer System

EFEM320-D02 Wafer Transfer System

EFEM320-D02 Wafer Transfer System

EFEM320-D03 Wafer Transfer System

EFEM320-D03 Wafer Transfer System

EFEM320-D06 Wafer Transfer System

EFEM320-D06 Wafer Transfer System

EFEM320-D08 Wafer Transfer System

EFEM320-D08 Wafer Transfer System

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