RWSE Wafer Robot
Key Features
Direct-drive motor transmission design with repeatability of ±0.1 mm; optional wafer flip module supports non-radial pick-and-place operations.
Repeatability
±0.1 mm
Z-Axis Stroke
Max.500 mm
Rated Load
1-3 kg
Applications
HIWIN Technical Support
Wafer Robots · RWSE Wafer Robot
Technical Description and Selection ReferenceProduct Overview
The RWSE wafer robot is part of HIWIN Technologies' (HIWIN) wafer robot product line. Featuring a direct-drive motor transmission design with repeatability of ±0.1 mm, it supports an optional wafer flip module for non-radial pick-and-place operations.
Product Features
- Direct-drive motor transmission design with repeatability of ±0.1 mm; optional wafer flip module supports non-radial pick-and-place operations.
Repeatability
±0.1 mm
Z-Axis Stroke
Max.500 mm
Rated Load
1-3 kg
Applications
The RWSE wafer robot is widely used in semiconductors, LED, flat panel displays, IC, automatic optical inspection, automation and other applications, meeting the requirements for stability and precision in precision transmission, automated production and industrial upgrading.
About HIWIN Technologies
HIWIN Technologies (HIWIN) is a leading global manufacturer of motion control products and system technologies, specializing in the R&D and manufacturing of precision ball screws, ball splines, linear guideways, single-axis and multi-axis robots, harmonic drives, torque motors and other products, providing high-precision, high-rigidity motion solutions for industries such as semiconductors, flat panel displays, machine tools, automation equipment and industrial machinery.
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Frequently Asked Questions
We provide Wafer Robots including atmospheric wafer robots and vacuum-compatible robots with 2, 3 or more axes, designed for wafer transfer in cleanrooms and vacuum process tools.
The RWSE Wafer Robot achieves high positioning repeatability with precise end-effector control, ensuring gentle and reliable wafer handling without misalignment or damage.
We offer vacuum-compatible versions of Wafer Robots with outgassing-controlled materials and sealed construction for use inside vacuum process chambers.
Yes. We design custom end effectors for Wafer Robots to handle 150 mm / 200 mm / 300 mm wafers and special substrates, with edge or vacuum gripping options.
Yes. We supply Wafer Robots with controllers, teaching pendants and integration support, including SECS/GEM communication where required.
Price depends on axes, payload and cleanroom/vacuum requirements. Please send your specifications for a quotation; standard systems deliver in 4–6 weeks.
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