EFEM320-D03 Wafer Transfer System
Key Features
HIWIN's wafer transfer system (EFEM) is a complete automation system. Through vertical integration and its self-developed control system, HIWIN enables flexible configuration of peripheral accessories such as Wafer ID reading, cassette RFID sensing, wafer edge alignment, protruding wafer detection and station presence sensing, and pairs the wafer robot of the corresponding model with each product specification. This effectively provides customized services for customers with different processes and applications, making their equipment and processes more efficient and competitive.
HIWIN Technical Support
Wafer Transfer Systems · EFEM320-D03 Wafer Transfer System
Technical Description and Selection ReferenceProduct Overview
The EFEM320-D03 wafer transfer system is part of HIWIN Technologies' (HIWIN) wafer transfer system product line. HIWIN's wafer transfer system (EFEM) is a complete automation system. Through vertical integration and its self-developed control system, HIWIN enables flexible configuration of peripheral accessories such as Wafer ID reading, cassette RFID sensing, wafer edge alignment, protruding wafer detection and station presence sensing, and pairs the wafer robot of the corresponding model with each product specification. This effectively provides customized services for customers with different processes and applications, making their equipment and processes more efficient and competitive.
Product Features
- HIWIN's wafer transfer system (EFEM) is a complete automation system. Through vertical integration and its self-developed control system, HIWIN enables flexible configuration of peripheral accessories such as Wafer ID reading, cassette RFID sensing, wafer edge alignment, protruding wafer detection and station presence sensing, and pairs the wafer robot of the corresponding model with each product specification. This effectively provides customized services for customers with different processes and applications, making their equipment and processes more efficient and competitive.
About HIWIN Technologies
HIWIN Technologies (HIWIN) is a leading global manufacturer of motion control products and system technologies, specializing in the R&D and manufacturing of precision ball screws, ball splines, linear guideways, single-axis and multi-axis robots, harmonic drives, torque motors and other products, providing high-precision, high-rigidity motion solutions for industries such as semiconductors, flat panel displays, machine tools, automation equipment and industrial machinery.
Frequently Asked Questions
A wafer transfer system moves wafers between FOUPs, load ports, aligners and process tools inside a cleanroom, including the robot arm, track, controllers and software. Our Wafer Transfer Systems are built for high reliability and low particle generation.
The EFEM320-D03 Wafer Transfer System supports standard wafer sizes (150 mm / 200 mm / 300 mm) and industry-standard FOUP and cassette types, with precise slot mapping and mapping sensors.
Throughput depends on the arm configuration and motion profile. Our systems are optimized for short cycle times with smooth, vibration-free motion to protect wafers.
Yes. We integrate Wafer Transfer Systems with your process tools, providing the mechanical interface, control communication (SECS/GEM available) and alignment functions required.
Our Wafer Transfer Systems are designed to meet strict cleanroom requirements with minimized particle emission, sealed mechanisms and cleanroom-compatible materials.
Custom systems typically deliver in 4–6 weeks depending on configuration. Contact us with your requirements for a proposal and quotation.
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