Nano Positioning Stage
Key Features
Featuring a highly stable structural design and nanometer-level servo control, combined with software solutions, it enhances overall equipment precision, fully demonstrating the high integration of mechanics, electronics, and software to meet the upgrading requirements of semiconductor equipment.
Nanometer-Level Position Stability
±2 nm
Smooth Speed Control @100 mm/s
±0.1%
HIWIN Technical Support
Linear Motor Stages · Nano Positioning Stage
Technical Description and Selection ReferenceProduct Overview
The nano positioning stage is a linear motor stage product in the HIWIN Technologies (HIWIN) series. Featuring a highly stable structural design and nanometer-level servo control, combined with software solutions, it enhances overall equipment precision, fully demonstrating the high integration of mechanics, electronics, and software to meet the upgrading requirements of semiconductor equipment.
Product Features
- Featuring a highly stable structural design and nanometer-level servo control, combined with software solutions, it enhances overall equipment precision, fully demonstrating the high integration of mechanics, electronics, and software to meet the upgrading requirements of semiconductor equipment.
Nanometer-Level Position Stability
±2 nm
Smooth Speed Control @100 mm/s
±0.1%
About HIWIN Technologies
HIWIN Technologies (HIWIN) is a leading global manufacturer of motion control products and system technology. Specializing in the R&D and manufacturing of precision ball screws, ball splines, linear guideways, single-axis and multi-axis robots, harmonic drives, and torque motors, it provides high-precision, high-rigidity motion solutions for the semiconductor, flat panel, machine tool, automation equipment, and industrial machinery industries.
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Frequently Asked Questions
A linear motor stage moves directly without ball screws or belts, achieving very high speed, acceleration and accuracy with zero backlash. Our Linear Motor Stages are used in semiconductor, laser processing, inspection and precision assembly.
The Nano Positioning Stage achieves sub-micron positioning accuracy, high acceleration and travel lengths from tens to hundreds of millimeters with an integrated linear encoder. Specify your requirements for the right configuration.
Iron-core motors provide higher force, while ironless (coreless) motors offer zero cogging and smoother motion for the highest precision. We select the best Linear Motor Stages motor type for your accuracy and force needs.
Yes. We build XY, gantry and customized multi-axis Linear Motor Stages platforms with granite or aluminum bases, integrated encoders and motion control, delivering a complete high-precision positioning system.
Yes. We supply Nano Positioning Stage as a complete system with matched drive and controller, tuned for optimal performance, so you can integrate it directly into your machine.
Standard stages ship within 20 days; custom multi-axis systems depend on complexity. Send us your travel, accuracy and speed requirements for a quotation.
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