Air Bearing Positioning Stage
Key Features
Developed for advanced semiconductor and flat panel process equipment, this nanometer-level air bearing positioning stage leads the industry by adopting new vacuum preloaded, low-energy-consumption air bearings, dynamic reaction force balancing, and inertia compensation technology, achieving nanometer-accuracy requirements within one-thousandth of a second and greatly reducing motion settling time and component wear rates while enhancing equipment productivity and reliability. Complete intelligent remote system diagnostics and global customer support help customers significantly shorten equipment development timelines, saving integration time and cost so they can focus more on their own critical process know-how.
HIWIN Technical Support
Linear Motor Stages · Air Bearing Positioning Stage
Technical Description and Selection ReferenceProduct Overview
The air bearing positioning stage is a linear motor stage product in the HIWIN Technologies (HIWIN) series. Developed for advanced semiconductor and flat panel process equipment, this nanometer-level air bearing positioning stage leads the industry by adopting new vacuum preloaded, low-energy-consumption air bearings, dynamic reaction force balancing, and inertia compensation technology, achieving nanometer-accuracy requirements within one-thousandth of a second and greatly reducing motion settling time and component wear rates while enhancing equipment productivity and reliability. Complete intelligent remote system diagnostics and global customer support help customers significantly shorten equipment development timelines, saving integration time and cost so they can focus more on their own critical process know-how.
Product Features
- Developed for advanced semiconductor and flat panel process equipment, this is a nanometer-level air bearing positioning stage.
- Leads the industry by adopting new vacuum preloaded, low-energy-consumption air bearings, dynamic reaction force balancing, and inertia compensation technology, achieving nanometer-accuracy requirements within one-thousandth of a second and greatly reducing motion settling time and component wear rates while enhancing equipment productivity and reliability.
- Complete intelligent remote system diagnostics and global customer support help customers significantly shorten equipment development timelines, saving integration time and cost so they can focus more on their own critical process know-how.
About HIWIN Technologies
HIWIN Technologies (HIWIN) is a leading global manufacturer of motion control products and system technology. Specializing in the R&D and manufacturing of precision ball screws, ball splines, linear guideways, single-axis and multi-axis robots, harmonic drives, and torque motors, it provides high-precision, high-rigidity motion solutions for the semiconductor, flat panel, machine tool, automation equipment, and industrial machinery industries.
Frequently Asked Questions
A linear motor stage moves directly without ball screws or belts, achieving very high speed, acceleration and accuracy with zero backlash. Our Linear Motor Stages are used in semiconductor, laser processing, inspection and precision assembly.
The Air Bearing Positioning Stage achieves sub-micron positioning accuracy, high acceleration and travel lengths from tens to hundreds of millimeters with an integrated linear encoder. Specify your requirements for the right configuration.
Iron-core motors provide higher force, while ironless (coreless) motors offer zero cogging and smoother motion for the highest precision. We select the best Linear Motor Stages motor type for your accuracy and force needs.
Yes. We build XY, gantry and customized multi-axis Linear Motor Stages platforms with granite or aluminum bases, integrated encoders and motion control, delivering a complete high-precision positioning system.
Yes. We supply Air Bearing Positioning Stage as a complete system with matched drive and controller, tuned for optimal performance, so you can integrate it directly into your machine.
Standard stages ship within 20 days; custom multi-axis systems depend on complexity. Send us your travel, accuracy and speed requirements for a quotation.
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